Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9709902 | Projection exposure tool for microlithography and method for microlithographic imaging | Aksel Goehnermeier | 2017-07-18 |
| 9606339 | Mirror of a projection exposure apparatus for microlithography with mirror surfaces on different mirror sides, and projection exposure apparatus | Ralf Mueller, Wolfgang Singer | 2017-03-28 |