Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9804378 | Arrangement for light sheet microscopy | David Shafer, Artur Degen, Jörg Siebenmorgen | 2017-10-31 |
| 9606339 | Mirror of a projection exposure apparatus for microlithography with mirror surfaces on different mirror sides, and projection exposure apparatus | Jochen Hetzler, Ralf Mueller | 2017-03-28 |