Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9746778 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2017-08-29 |
| 9703098 | Lens module comprising at least one exchangeable optical element | Guido Soyez, Stephan Back, Joachim Buechele, Julian Kaller, Harald Woelfle | 2017-07-11 |
| 9575224 | Mirror, projection objective with such mirror, and projection exposure apparatus for microlithography with such projection objective | Rolf Freimann, Norman Baer, Thure Boehm, Gero Wittich | 2017-02-21 |
| 9551944 | Method for replacing objective parts | Bernhard Geuppert, Harald Woelfle, Peter Deufel | 2017-01-24 |