Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9726985 | Stage system and a lithographic apparatus | Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Antonius Franciscus Johannes De Groot, Theodorus Petrus Maria Cadee, Robertus Mathijs Gerardus Rijs, Richard Henricus Adrianus Van Lieshout | 2017-08-08 |
| 9726988 | Multi-stage system, a control method therefor, and a lithographic apparatus | Hans Butler | 2017-08-08 |
| 9715171 | Imprint lithographic apparatus and imprint lithographic method | Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Jeroen Pieter Starreveld, Cornelius Adrianus Lambertus De Hoon, Francois Xavier Debiesme | 2017-07-25 |