Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9785060 | Stage system and lithographic apparatus comprising such stage system | Ruud Antonius Catharina Maria Beerens, Rob Johan Theodoor Rutten, Jan Steven Christiaan Westerlaken, Koen Jacobus Johannes Maria Zaal, Engelbertus Antonius Fransiscus Van Der Pasch | 2017-10-10 |
| 9726985 | Stage system and a lithographic apparatus | Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Antonius Franciscus Johannes De Groot, Johannes Petrus Martinus Bernardus Vermeulen, Theodorus Petrus Maria Cadee, Robertus Mathijs Gerardus Rijs | 2017-08-08 |