Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9851644 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens | 2017-12-26 |
| 9785060 | Stage system and lithographic apparatus comprising such stage system | Ruud Antonius Catharina Maria Beerens, Rob Johan Theodoor Rutten, Jan Steven Christiaan Westerlaken, Richard Henricus Adrianus Van Lieshout, Engelbertus Antonius Fransiscus Van Der Pasch | 2017-10-10 |
| 9618859 | Lithographic apparatus and device manufacturing method | Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Jan Bernard Plechelmus Van Schoot, Theodorus Petrus Maria Cadee | 2017-04-11 |
| 9581916 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens, Noud Jan Gilissen, Martinus Hendrikus Antonius Leenders | 2017-02-28 |