| 9851644 |
Lithographic apparatus and device manufacturing method |
Koen Jacobus Johannes Maria Zaal |
2017-12-26 |
| 9696638 |
Lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, William Peter Van Drent, Frank Staals +2 more |
2017-07-04 |
| 9632435 |
Lithographic apparatus and method |
Nicolaas Ten Kate, Johannes Henricus Wilhelmus Jacobs, Bastiaan Andreas Wilhelmus Hubertus Knarren, Thibault Simon Mathieu Laurent, Robbert Jan Voogd +3 more |
2017-04-25 |
| 9618853 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Nicolaas Rudolf Kemper |
2017-04-11 |
| 9606429 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Marcel Beckers, Marco Polizzi, Michel Riepen +4 more |
2017-03-28 |
| 9581916 |
Lithographic apparatus and device manufacturing method |
Noud Jan Gilissen, Martinus Hendrikus Antonius Leenders, Koen Jacobus Johannes Maria Zaal |
2017-02-28 |
| 9541843 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2017-01-10 |