Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9766556 | Lithographic apparatus and device manufacturing method | Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Sergei Shulepov | 2017-09-19 |
| 9746782 | Lithographic apparatus and a device manufacturing method | Cornelius Maria Rops, Michel Riepen | 2017-08-29 |
| 9746788 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more | 2017-08-29 |
| 9618853 | Lithographic apparatus and device manufacturing method | Martinus Hendrikus Antonius Leenders, Joost Jeroen Ottens | 2017-04-11 |
| 9606429 | Lithographic apparatus, drying device, metrology apparatus and device manufacturing method | Nicolaas Ten Kate, Joost Jeroen Ottens, Marcel Beckers, Marco Polizzi, Michel Riepen +4 more | 2017-03-28 |