| 9766556 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Sergei Shulepov |
2017-09-19 |
| 9753383 |
Radiation source and lithographic apparatus |
Michel Riepen, Dzmitry Labetski, Wilbert Jan Mestrom, Wim Ronald Kampinga, Jan Okke Nieuwenkamp +12 more |
2017-09-05 |
| 9737934 |
Substrate holder and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg |
2017-08-22 |
| 9678445 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade |
2017-06-13 |
| 9632435 |
Lithographic apparatus and method |
Johannes Henricus Wilhelmus Jacobs, Joost Jeroen Ottens, Bastiaan Andreas Wilhelmus Hubertus Knarren, Thibault Simon Mathieu Laurent, Robbert Jan Voogd +3 more |
2017-04-25 |
| 9625828 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Michel Riepen, Erik Henricus Egidius Catharina Eummelen, Sandra Van Der Graaf, Rogier Hendrikus Magdalena Cortie, Takeshi Kaneko +6 more |
2017-04-18 |
| 9606429 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Joost Jeroen Ottens, Marcel Beckers, Marco Polizzi, Michel Riepen +4 more |
2017-03-28 |
| 9588437 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Niek Jacobus Johannes Roset, Michel Riepen, Henricus Jozef Castelijns, Cornelius Maria Rops +1 more |
2017-03-07 |