Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9753383 | Radiation source and lithographic apparatus | Michel Riepen, Dzmitry Labetski, Wim Ronald Kampinga, Jan Okke Nieuwenkamp, Jacob Brinkert +12 more | 2017-09-05 |
| 9648714 | Fuel system for lithographic apparatus, EUV source, lithographic apparatus and fuel filtering method | Gerardus Hubertus Petrus Maria Swinkels | 2017-05-09 |