Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9753383 | Radiation source and lithographic apparatus | Michel Riepen, Wilbert Jan Mestrom, Wim Ronald Kampinga, Jan Okke Nieuwenkamp, Jacob Brinkert +12 more | 2017-09-05 |
| 9715174 | Droplet generator, EUV radiation source, lithographic apparatus, method for generating droplets and device manufacturing method | Johan Frederik Dijksman, Ramin Badie, Ronald Johannes Hultermans | 2017-07-25 |
| 9671698 | Fuel stream generator, source collector apparatus and lithographic apparatus | Hendrikus Gijsbertus Schimmel | 2017-06-06 |