Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823589 | Lithographic apparatus and method | Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens +5 more | 2017-11-21 |
| 9753383 | Radiation source and lithographic apparatus | Michel Riepen, Dzmitry Labetski, Wilbert Jan Mestrom, Wim Ronald Kampinga, Jan Okke Nieuwenkamp +12 more | 2017-09-05 |
| 9715174 | Droplet generator, EUV radiation source, lithographic apparatus, method for generating droplets and device manufacturing method | Johan Frederik Dijksman, Ronald Johannes Hultermans, Dzmitry Labetski | 2017-07-25 |