Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823589 | Lithographic apparatus and method | Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Raymond Wilhelmus Louis Lafarre, Koen Steffens, Takeshi Kaneko +5 more | 2017-11-21 |
| 9753382 | Sensor, lithographic apparatus and device manufacturing method | Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Haico Victor Kok, Yuri Johannes Gabriël Van De Vijver, Johannes Antonius Maria Van De Wal +6 more | 2017-09-05 |
| 9632435 | Lithographic apparatus and method | Nicolaas Ten Kate, Johannes Henricus Wilhelmus Jacobs, Joost Jeroen Ottens, Thibault Simon Mathieu Laurent, Robbert Jan Voogd +3 more | 2017-04-25 |