Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823589 | Lithographic apparatus and method | Thibault Simon Mathieu Laurent, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens, Takeshi Kaneko +5 more | 2017-11-21 |
| 9618858 | Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table | Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Thibault Simon Mathieu Laurent, Marcio Alexandre Cano Miranda, Ruud Hendrikus Martinus Johannes Bloks +2 more | 2017-04-11 |