Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9709901 | Lithographic apparatus and a method of operating the apparatus | Ivo Adam Johannes Thomas, Siebe Landheer, Arnout Johannes Meester, Gheorghe Tanasa | 2017-07-18 |
| 9645506 | Lithographic apparatus and device manufacturing method | Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more | 2017-05-09 |
| 9618858 | Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table | Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Gerardus Adrianus Antonius Maria Kusters, Thibault Simon Mathieu Laurent, Ruud Hendrikus Martinus Johannes Bloks +2 more | 2017-04-11 |