Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9753382 | Sensor, lithographic apparatus and device manufacturing method | Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Yuri Johannes Gabriël Van De Vijver, Johannes Antonius Maria Van De Wal, Bastiaan Andreas Wilhelmus Hubertus Knarren +6 more | 2017-09-05 |
| 9690207 | Sensor system for lithography | Robbert Jan Voogd | 2017-06-27 |