Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841680 | Source collector apparatus, lithographic apparatus and method | Niek Antonius Jacobus Maria Kleemans, Denis Alexandrovich Glushkov, Benedictus Mathijs Renkens, Gerardus Hubertus Petrus Maria Swinkels, Christiaan Johannes Petrus Verspeek | 2017-12-12 |
| 9715174 | Droplet generator, EUV radiation source, lithographic apparatus, method for generating droplets and device manufacturing method | Johan Frederik Dijksman, Ramin Badie, Dzmitry Labetski | 2017-07-25 |