Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841680 | Source collector apparatus, lithographic apparatus and method | Niek Antonius Jacobus Maria Kleemans, Denis Alexandrovich Glushkov, Ronald Johannes Hultermans, Benedictus Mathijs Renkens, Christiaan Johannes Petrus Verspeek | 2017-12-12 |
| 9648714 | Fuel system for lithographic apparatus, EUV source, lithographic apparatus and fuel filtering method | Wilbert Jan Mestrom | 2017-05-09 |
| 9632419 | Radiation source | Jan Bernard Plechelmus Van Schoot, Vadim Yevgenyevich Banine, Olav Waldemar Vladimir Frijns, Hermanus Johannes Maria Kreuwel, Johannes Hubertus Josephina Moors +3 more | 2017-04-25 |
| 9594306 | Lithographic apparatus, spectral purity filter and device manufacturing method | Vadim Yevgenyevich Banine, Wilhelmus Petrus De Boeij, Antonius Johannes Josephus Van Dijsseldonk, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors +2 more | 2017-03-14 |