Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841680 | Source collector apparatus, lithographic apparatus and method | Niek Antonius Jacobus Maria Kleemans, Denis Alexandrovich Glushkov, Ronald Johannes Hultermans, Benedictus Mathijs Renkens, Gerardus Hubertus Petrus Maria Swinkels | 2017-12-12 |