Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9625828 | Fluid handling structure, lithographic apparatus and device manufacturing method | Michel Riepen, Erik Henricus Egidius Catharina Eummelen, Rogier Hendrikus Magdalena Cortie, Takeshi Kaneko, Nina Vladimirovna Dziomkina +6 more | 2017-04-18 |