Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829803 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg, Peter Van Delft | 2017-11-28 |
| 9737934 | Substrate holder and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg | 2017-08-22 |
| 9678445 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Nicolaas Ten Kate, Yogesh Pramod Karade | 2017-06-13 |
| 9625828 | Fluid handling structure, lithographic apparatus and device manufacturing method | Michel Riepen, Erik Henricus Egidius Catharina Eummelen, Sandra Van Der Graaf, Rogier Hendrikus Magdalena Cortie, Takeshi Kaneko +6 more | 2017-04-18 |