Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829803 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg, Peter Van Delft | 2017-11-28 |