Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9766556 | Lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate | 2017-09-19 |
| 9625833 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Koen Steffens, Mathieus Anna Karel Van Lierop, Samuel Bertrand Dominique David, David Bessems | 2017-04-18 |
| 9618835 | Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressure | Daniel Jozef Maria Direcks, Erik Henricus Egidius Catharina Eummelen, Clemens Johannes Gerardus Van Den Dungen, Maikel Adrianus Cornelis Schepers, Pieter Mulder +2 more | 2017-04-11 |