Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9625828 | Fluid handling structure, lithographic apparatus and device manufacturing method | Michel Riepen, Erik Henricus Egidius Catharina Eummelen, Sandra Van Der Graaf, Rogier Hendrikus Magdalena Cortie, Takeshi Kaneko +6 more | 2017-04-18 |
| 9625829 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Cornelius Maria Rops | 2017-04-18 |
| 9625833 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Sergei Shulepov, Koen Steffens, Mathieus Anna Karel Van Lierop, Samuel Bertrand Dominique David | 2017-04-18 |
| 9618835 | Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressure | Daniel Jozef Maria Direcks, Erik Henricus Egidius Catharina Eummelen, Clemens Johannes Gerardus Van Den Dungen, Maikel Adrianus Cornelis Schepers, Sergei Shulepov +2 more | 2017-04-11 |
| 9563132 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Erik Henricus Egidius Catharina Eummelen, Michel Riepen, Rogier Hendrikus Magdalena Cortie, Adrianes Johannes Baeten, Cornelius Maria Rops | 2017-02-07 |