Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9746782 | Lithographic apparatus and a device manufacturing method | Nicolaas Rudolf Kemper, Michel Riepen | 2017-08-29 |
| 9625828 | Fluid handling structure, lithographic apparatus and device manufacturing method | Michel Riepen, Erik Henricus Egidius Catharina Eummelen, Sandra Van Der Graaf, Rogier Hendrikus Magdalena Cortie, Takeshi Kaneko +6 more | 2017-04-18 |
| 9625829 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | David Bessems | 2017-04-18 |
| 9588437 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Rogier Hendrikus Magdalena Cortie, Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Michel Riepen, Henricus Jozef Castelijns +1 more | 2017-03-07 |
| 9563132 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | David Bessems, Erik Henricus Egidius Catharina Eummelen, Michel Riepen, Rogier Hendrikus Magdalena Cortie, Adrianes Johannes Baeten | 2017-02-07 |