Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9618835 | Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressure | Daniel Jozef Maria Direcks, Erik Henricus Egidius Catharina Eummelen, Maikel Adrianus Cornelis Schepers, Sergei Shulepov, Pieter Mulder +2 more | 2017-04-11 |