Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9715179 | Lithographic apparatus and device manufacturing method | Marcus Adrianus Van De Kerkhof, Siebe Landheer, Jeroen Peter Johannes Bruijstens, Ivo Adam Johannes Thomas, Franciscus Johannes Joseph Janssen | 2017-07-25 |
| 9606429 | Lithographic apparatus, drying device, metrology apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Joost Jeroen Ottens, Marco Polizzi, Michel Riepen +4 more | 2017-03-28 |