Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9715179 | Lithographic apparatus and device manufacturing method | Marcus Adrianus Van De Kerkhof, Siebe Landheer, Marcel Beckers, Ivo Adam Johannes Thomas, Franciscus Johannes Joseph Janssen | 2017-07-25 |