Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823590 | Lithographic apparatus and device manufacturing method | Manish Ranjan, Carlo Cornelis Maria Luijten, Maksym Chernyshov | 2017-11-21 |
| 9772565 | Immersion liquid, exposure apparatus, and exposure process | Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay, Anthonie Kuijper | 2017-09-26 |
| 9715179 | Lithographic apparatus and device manufacturing method | Marcus Adrianus Van De Kerkhof, Siebe Landheer, Marcel Beckers, Jeroen Peter Johannes Bruijstens, Ivo Adam Johannes Thomas | 2017-07-25 |
| 9645506 | Lithographic apparatus and device manufacturing method | Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more | 2017-05-09 |
| 9625835 | Lithographic apparatus and device manufacturing method | Manish Ranjan, Carlo Cornelis Maria Luijten, Maksym Chernyshov | 2017-04-18 |