Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823590 | Lithographic apparatus and device manufacturing method | Manish Ranjan, Franciscus Johannes Joseph Janssen, Maksym Chernyshov | 2017-11-21 |
| 9625835 | Lithographic apparatus and device manufacturing method | Manish Ranjan, Franciscus Johannes Joseph Janssen, Maksym Chernyshov | 2017-04-18 |
| 9606445 | Lithographic apparatus and method of manufacturing a device | Vadim Yevgenyevich Banine, Arthur Winfried Eduardus Minnaert, Marcel Johannus Elisabeth Hubertus Muitjens, Andrei Mikhailovich Yakunin, Luigi Scaccabarozzi +8 more | 2017-03-28 |