Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798247 | Lithographic apparatus and device manufacturing method involving a liquid confinement structure | Hans Jansen, Marco Koert Stavenga | 2017-10-24 |
| 9772565 | Immersion liquid, exposure apparatus, and exposure process | Hans Jansen, Marco Koert Stavenga, Franciscus Johannes Joseph Janssen, Anthonie Kuijper | 2017-09-26 |
| 9753380 | Lithographic apparatus and device manufacturing method | Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more | 2017-09-05 |
| 9645507 | Lithographic apparatus and device manufacturing method | Hans Jansen, Marco Koert Stavenga | 2017-05-09 |
| 9588442 | Lithographic apparatus and device manufacturing method | Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra +4 more | 2017-03-07 |