Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9811007 | Lithographic apparatus and method of cooling a component in a lithographic apparatus | Frank Johannes Jacobus Van Boxtel, Leonarda Hendrika Van Den Heuvel | 2017-11-07 |
| 9753380 | Lithographic apparatus and device manufacturing method | Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Franciscus Johannes Herman Maria Teunissen +4 more | 2017-09-05 |
| 9599908 | Lithographic apparatus and contamination removal or prevention method | Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Martinus Hendrikus Antonius Leenders, Peter Franciscus Wanten, Jacques Cor Johan Van Der Donck +4 more | 2017-03-21 |