Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9811007 | Lithographic apparatus and method of cooling a component in a lithographic apparatus | Antonius Johannus Van Der Net, Leonarda Hendrika Van Den Heuvel | 2017-11-07 |
| 9766557 | Patterning device support, lithographic apparatus, and method of controlling patterning device temperature | Earl William Ebert, Johannes Onvlee, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro +5 more | 2017-09-19 |
| 9632433 | Patterning device support, lithographic apparatus, and method of controlling patterning device temperature | Earl William Ebert, Johannes Onvlee, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro +5 more | 2017-04-25 |
| 9632434 | Reticle cooling system in a lithographic apparatus | Earl William Ebert, Johannes Onvlee, Samir Nayfeh, Mark Josef Schuster, Peter A. Delmastro +6 more | 2017-04-25 |
| 9575406 | Pump system, a carbon dioxide supply system, an extraction system, a lithographic apparatus and a device manufacturing method | Marc Léon Van Der Gaag, Leonarda Hendrika Van Den Heuvel, Arjan Hubrecht Josef Anna Martens | 2017-02-21 |