Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9811007 | Lithographic apparatus and method of cooling a component in a lithographic apparatus | Frank Johannes Jacobus Van Boxtel, Antonius Johannus Van Der Net | 2017-11-07 |
| 9575406 | Pump system, a carbon dioxide supply system, an extraction system, a lithographic apparatus and a device manufacturing method | Marc Léon Van Der Gaag, Arjan Hubrecht Josef Anna Martens, Frank Johannes Jacobus Van Boxtel | 2017-02-21 |