Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798246 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more | 2017-10-24 |
| 9733575 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Joeri Lof, Klaus Simon, Alexander Straaijer | 2017-08-15 |
| 9715178 | Immersion photolithography system and method using microchannel nozzles | Herman Vogel, Klaus Simon | 2017-07-25 |
| 9709899 | Immersion photolithography system and method using microchannel nozzles | Herman Vogel, Klaus Simon | 2017-07-18 |
| 9588442 | Lithographic apparatus and device manufacturing method | Christiaan Alexander Hoogendam, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens +4 more | 2017-03-07 |