Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9746788 | Lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more | 2017-08-29 |
| 9715178 | Immersion photolithography system and method using microchannel nozzles | Klaus Simon, Antonius Theodorus Anna Maria Derksen | 2017-07-25 |
| 9709899 | Immersion photolithography system and method using microchannel nozzles | Klaus Simon, Antonius Theodorus Anna Maria Derksen | 2017-07-18 |