Issued Patents 2017
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798250 | Lithographic apparatus for measuring overlay error and a device manufacturing method | Leonardus Henricus Marie Verstappen | 2017-10-24 |
| 9746785 | Sub-wavelength segmentation in measurement targets on substrates | Maurits Van Der Schaar, Sami Musa | 2017-08-29 |
| 9715179 | Lithographic apparatus and device manufacturing method | Siebe Landheer, Marcel Beckers, Jeroen Peter Johannes Bruijstens, Ivo Adam Johannes Thomas, Franciscus Johannes Joseph Janssen | 2017-07-25 |
| 9658541 | Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate | Willem Jurrianus Venema, Bearrach Moest, Vasco Miguel Matias Serrao, Cedran Bomhof | 2017-05-23 |
| 9594311 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Maurits Van Der Schaar, Andreas Fuchs, Martyn John Coogans | 2017-03-14 |
| 9594310 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Maurits Van Der Schaar, Andreas Fuchs, Martyn John Coogans | 2017-03-14 |
| 9568841 | Lithographic apparatus and device manufacturing method | Timotheus Franciscus Sengers, Mark Kroon, Kees Van Weert | 2017-02-14 |
| 9541843 | Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2017-01-10 |