Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9658541 | Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate | Marcus Adrianus Van De Kerkhof, Bearrach Moest, Vasco Miguel Matias Serrao, Cedran Bomhof | 2017-05-23 |
| 9568833 | Method of operating a patterning device and lithographic apparatus | Vitaliy Prosyentsov, Kars Zeger Troost, Adrianus Martinus Van Der Wielen | 2017-02-14 |