Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786044 | Method of measuring asymmetry, inspection apparatus, lithographic system and device manufacturing method | Peter Hanzen Wardenier, Amandev Singh, Maxime D'Alfonso, Hilko Dirk Bos | 2017-10-10 |
| 9594310 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Marcus Adrianus Van De Kerkhof, Maurits Van Der Schaar, Martyn John Coogans | 2017-03-14 |
| 9594311 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Marcus Adrianus Van De Kerkhof, Maurits Van Der Schaar, Martyn John Coogans | 2017-03-14 |