Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786044 | Method of measuring asymmetry, inspection apparatus, lithographic system and device manufacturing method | Andreas Fuchs, Amandev Singh, Maxime D'Alfonso, Hilko Dirk Bos | 2017-10-10 |