Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9746785 | Sub-wavelength segmentation in measurement targets on substrates | Marcus Adrianus Van De Kerkhof, Sami Musa | 2017-08-29 |
| 9714827 | Metrology method and apparatus, lithographic system, device manufacturing method and substrate | Kaustuve Bhattacharyya, Hendrik Jan Hidde Smilde | 2017-07-25 |
| 9632430 | Lithographic system, lithographic method and device manufacturing method | Everhardus Cornelis Mos, Scott Anderson Middlebrooks | 2017-04-25 |
| 9594310 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Marcus Adrianus Van De Kerkhof, Andreas Fuchs, Martyn John Coogans | 2017-03-14 |
| 9594311 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Marcus Adrianus Van De Kerkhof, Andreas Fuchs, Martyn John Coogans | 2017-03-14 |