Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9594310 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Marcus Adrianus Van De Kerkhof, Maurits Van Der Schaar, Andreas Fuchs | 2017-03-14 |
| 9594311 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Marcus Adrianus Van De Kerkhof, Maurits Van Der Schaar, Andreas Fuchs | 2017-03-14 |