Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9811003 | Metrology method and apparatus, substrate, lithographic system and device manufacturing method | Martin Jacobus Johan Jak, Armand Eugene Albert Koolen | 2017-11-07 |
| 9719945 | Metrology method and apparatus, lithographic system and device manufacturing method | Omer Abubaker Omer Adam | 2017-08-01 |
| 9714827 | Metrology method and apparatus, lithographic system, device manufacturing method and substrate | Maurits Van Der Schaar, Kaustuve Bhattacharyya | 2017-07-25 |
| 9535338 | Metrology method and apparatus, substrate, lithographic system and device manufacturing method | Martin Jacobus Johan Jak, Armand Eugene Albert Koolen | 2017-01-03 |
| 9535342 | Metrology method and apparatus, and device manufacturing method | Patrick Warnaar | 2017-01-03 |