Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9804504 | Method and apparatus for design of a metrology target | Guangqing Chen, Eric Kent, Jen-Shiang Wang | 2017-10-31 |
| 9719945 | Metrology method and apparatus, lithographic system and device manufacturing method | Hendrik Jan Hidde Smilde | 2017-08-01 |