Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9804504 | Method and apparatus for design of a metrology target | Guangqing Chen, Eric Kent, Omer Abubaker Omer Adam | 2017-10-31 |
| 9696635 | Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process | Adrianus Fransiscus Petrus Engelen, Henricus Johannes Lambertus Megens, Johannes Catharinus Hubertus Mulkens, Robert Kazinczi | 2017-07-04 |