Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9696635 | Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process | Adrianus Fransiscus Petrus Engelen, Johannes Catharinus Hubertus Mulkens, Robert Kazinczi, Jen-Shiang Wang | 2017-07-04 |