Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9753379 | Inspection apparatus and methods, methods of manufacturing devices | Amandev Singh, Henricus Petrus Maria Pellemans | 2017-09-05 |
| 9535342 | Metrology method and apparatus, and device manufacturing method | Hendrik Jan Hidde Smilde | 2017-01-03 |