Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9811006 | Method of determining a measurement subset of metrology points on a substrate, associated apparatus and computer program | Jochem Sebastiaan Wildenberg | 2017-11-07 |
| 9632430 | Lithographic system, lithographic method and device manufacturing method | Maurits Van Der Schaar, Scott Anderson Middlebrooks | 2017-04-25 |
| 9594029 | Methods and apparatus for measuring a property of a substrate | Wouter Lodewijk Elings, Franciscus Bernardus Maria Van Bilsen, Christianus Gerardus Maria De Mol, Hoite Pieter Theodoor Tolsma, Peter Ten Berge +5 more | 2017-03-14 |