Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798250 | Lithographic apparatus for measuring overlay error and a device manufacturing method | Marcus Adrianus Van De Kerkhof | 2017-10-24 |
| 9594029 | Methods and apparatus for measuring a property of a substrate | Wouter Lodewijk Elings, Franciscus Bernardus Maria Van Bilsen, Christianus Gerardus Maria De Mol, Everhardus Cornelis Mos, Hoite Pieter Theodoor Tolsma +5 more | 2017-03-14 |