Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9696640 | Lithographic apparatus | Theodorus Petrus Maria Cadee, Harmeet Singh | 2017-07-04 |
| 9684249 | Lithographic apparatus with a metrology system for measuring a position of a substrate table | Sjoerd Nicolaas Lambertus Donders, Theodorus Petrus Maria Cadee | 2017-06-20 |
| 9618859 | Lithographic apparatus and device manufacturing method | Sjoerd Nicolaas Lambertus Donders, Jan Bernard Plechelmus Van Schoot, Koen Jacobus Johannes Maria Zaal, Theodorus Petrus Maria Cadee | 2017-04-11 |